General description

It features a four-segment Backscatter Detector (BSD) as its standard imaging component, delivering clear and well-contrasted images in both compositional and topographic modes.. The Cerium Hexaboride source ensures exceptional brightness and longevity, providing high-quality images even for non-conductive and non-metallized samples, and optimizing the signal for the EDS microprobe.

Equipment name and Company: PHENOM XL G2/ThermoFisher

Technical specification

• Magnification range: 160-200.000x
• Resolution: <10nm
• CCD integrated color camera for sample navigation: 3-16X
• Field of detectable elements: B-Am
• Backscatter detector with compositional or topographic mode
• Voltage range: in the range between 4.8 kV and 20.5 kV with continuous selection
• Image resolution: up to 7680 x 4800
• Sample size: max. 100mm x 100mm (up to 36 12mm stubs)
• Scanning area: 50mmx50mm (optional 100mmx100mm)
• Motorized stage x, y
• Unique Working Distance (WD) for high-resolution image acquisition and EDS analysis