Description

Stylus profilometers is an high-precision instrument that measure the topography of profiles through the contact of a fine tip with the surface. It is used to analyze roughness and step-height on wafers.

Technical specification

• sylus force between 0,03 to 50 mgf.
• low forces useful for samples with photoresist, Au and In
• step height: Nanometers to 1000µm
• Wafer handler: Automatically loads 75mm through 200mm opaque (e.g., silicon) and transparent (e.g., sapphire) samples