Description

The MPI TS2000-SE probe station is an electrical and optical characterisation instrument for electronic and photonic integrated circuits. Equipped with full electrostatic shielding, electrical probes for both DC and RF, and fibre-optic access/exit, it is designed for semi-automated characterisation of entire wafers (up to 8 inches) thanks to advanced automatic image recognition software.

Equipment name and Company: TS2000-SE/MPI

Technical specification

• MPI ShielDEnvironment™  technology for ultra-low noise measurements in DC/AC/RF/Optical
• 4 probes for DC/AC measurements
• 2 probes for RF measurements
• 2 probes for optical measurements
• Configurations: E/W Optical or RF, N/S DC/AC
• Wafer level edge optical coupling available (upon appropriate design)
• From chips (5x5 mm) up to 8 in wafers, vacuum chuck with automatic recognition
• Thermal chuck for measures between 20 and 200°C
• Semi-automatic side loading for safe and rapid wafer loading when performing high temperature measures
• Strumentazione di misura: Keysight B1500