General Description

The laser writer is a microfabrication tool that directly writes, with a UV laser beam, on photoresist. Because it is a mask-less direct writing approach, it is very versatile and it is usually emplyed for rapid prototyping of test structures directly on spin-coated wafers. Once the prototyping is completed, it can be used to fabricate optical masks for mask aligner (maximum area: 5x5 inch masks).

Applications: mask fabrication, integrated and diffractive optics, micromechanics and MEMS, maskless direct patterning,

Equipment name and Company: LW405 Microtech

Technical specification

• GaN laser source (405 nm, 60 mW) with direct modulation
• Optical resolution (minimum linewidth): 0.8, 2, 4, 8 μm, depending on objective (operator selectable) – writing speed is inversely proportional to objective numeric aperture / obtainable resolution.
• Autofocus, surface tracking (z stage) and gray-level (256 levels per pixel) patterning capability
• interferometric XY stages with nanopositioning capability
• Maximum substrate dimensions: 150 x 150 mm