Description

The chemical hoods for the lithographic processes are two. The first is devoted to the resist deposition and it is equipped with two Polos Spinners: 150i (max 6″) and 200i (max 8″). Both can also work with small fragments until 5 mm. The second is devoted to the resist development. 

Spinner Technical specification

• Unlimited Program Storage for recipes with multiple steps
• Rotation speed: 0-12000 rpm
• Acceleration /Deceleration 1-30,000 rpm/sec, selectable per step
• Time 0.1-99999 sec/step
• Rotation direction (CW, CCW, puddling)