Description

Two-photon polymerization as a direct laser writing technique allows for creating complex three-dimensional structures down to feature sizes on the order of 100 nm. Key elements of two-photon polymerization are lasers providing femtosecond pulses, suitable photosensitive materials (photoresists), a precise positioning stage and a computer to control the procedure.

 

Technical specification

  • Optical system
    • Laser       773 nm, FWHM 8 nm, 132 fs, 80 MHz, 500 mW
    • Objective 1                             100 x immersion oil, NA 1,4
    • Objective 2                        20 x, NA 0,5
    • Objective 3                             50 x, NA 0,8
  • Focusing                                manual
  • Nanopositioning stages:
    • Lateral resolution (X, Y) 100 nm or better (objective 1)
    • Vertical resolution (Z) 500 nm or better (objective 1)
    • Typical processing speed 0.1 – 10 mm/s
    • Maximum axis speed (X, Y) 300 mm/s
    • Maximum axis speed (Z) 2000 mm/s
    • Laser Scanner Galvano Scanner
    • Writing area (X, Y) 100 mm x 100 mm
    • Resolution (X,Y) 4 nm or better
    • Travel range (Z) 100 mm
    • Structuring height (Z) 2 mm (objective 2)
    • Overall accuracy (X, Y, Z) ±200 nm
    • Repeatability (X, Y) ±50 nm
    • Repeatability (Z) ±100 nm
  • Materials: works well with the proprietary Femtobond resin. Other photopolymerizable materials to be tested
  • The printer works with *.STL geometry files