Atomic Force Microscope (AFM)

General description

The atomic force microscope (AFM) is a technique that allows the 3D characterization of the surface of various kinds of samples. Given its versatility, AFM can be coupled with other techniques by using specialized hardware and types of probes (e.g., Kelvin probe force microscopy, magnetic force microscopy, piezoelectric force microscopy).

In AFM measurements, height can be achieved with sub-nanometer accuracy and high resolution, whereas the lateral resolution is affected by the shape of the AFM probe.

Equipment name and Company: NX20/Park Systems

Technical specification

  • Analysis of wafer up to 6 inch
  • Scan Range
    • XY axis: 100 µm x 100 µm
    • Z axis: 15 µm
  • Available AFM modes
    • Standard Imaging
      • True Non-Contact™ Mode
      • PinPoint™ AFM
      • Intermittent (tapping) AFM
      • Basic Contact AFM
      • Lateral Force Microscopy (LFM)
      • Phase imaging
  • Dielectric/Piezoelectric properties
    • Piezoresponse Force Microscopy (PFM)
  • Magnetic Properties
    • Magnetic Force Microscopy (MFM)
  • Electrical Properties
    • Conductive AFM
    • Electrostatic Force Microscopy (EFM)
    • Kelvin Probe Force Microscopy (KPFM)
    • IV Spectroscopy
  • Force measurements
    • Force/distance Spectroscopy
  • Mechanical properties
    • Force Modulation Microscopy (FMM)