Description:
The FC-2000 e-gun evaporator is a tool used to deposit thin films of metals and selected dielectrics. Heating of the crucible containing the material is carried out by means of an electron beam, guaranteeing uniformity and reaching the required high temperature also in non-thermally conductive materials.
Equipment model and company: FC-2000 TEMESCAL FerroTec
Technical specifications:
- available materials: at present Ti, Au, Ag, Cu, Al, Cr, Al2O3 – any metal and most oxides can be implemented upon request
- loadlock for rapid sample loading (1 x 10^ -6 Torr reached in 10 minutes)
- cryogenic pumping – base pressure: at best 3 x 10^ -8 Torr, enabling high-purity depositions
- large process chamber – hosting up to 12 x 4-inch wafers
- precise control of the deposition thickness by means of two quartz crystal microbalances