Description

The Telemark e-beam is an in-house built tool, dedicated to the deposition of superconductive metals for quantum technologies. To avoid unwanted contamination, it is restricted to selected materials used for the production of devices based on aluminium Josephson junctions and high quality factor resonators or waveguides (e.g. qubits and parametric amplifiers).

The machine reaches high vacuum levels, enabling deposition of pure elements – up to 7 x 10^ -8 mbar – and allows controlled surface oxidization of the evaporated films by means of a dedicated oxygen line in the loadlock.